Title :
Development of method to model surface of reflowed square microlens for image sensor
Author :
Kim, S.-M. ; Choi, M. ; Kim, S. ; Lim, J. ; Kang, S.
Author_Institution :
Yonsei Univ., Seoul
Abstract :
A numerical method to model the surface of a reflowed square micro- lens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8 x 4.8 mum and sag height of 1.55 mum was fabricated and the modelling accuracy was compared and analysed.
Keywords :
image sensors; microlenses; image sensor; photosensitivity; reflowed square microlens;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20080351
