A novel electromagnetic accelerometer

A novel micro-accelerometer based on electromagnetic field induction has been fabricated from Si <100> wafers using silicon micro machining techniques. For this design, measurements of acceleration ranging from 0-50 g have been experimentally demonstrated. The physical structure and a brief description of the fabrication process is given. The actual size of the device is 4.2/spl times/4.2 mm, its amplified output voltage varies linearly from 0-9 V with the rate of 0.175 V/g and the power consumption is less than 2.5 mW. Due to the simple structure a batch processing with on chip signal conditioning circuitry is possible. The required electronic circuitry compared to the capacitive accelerometers is much simpler.<>