Title :
The design of a high-resolution AC parametric tester
Author :
Blacksin, Jeffrey M. ; Megna, Frederick J.
Author_Institution :
Digital Equipment Corporation, Hudson, MA
fDate :
5/1/1987 12:00:00 AM
Abstract :
We present the design for an automatic wafer-probing ac characterization system that provides 0.1-fF capacitance resolution at the wafer level. The most important difficulties that had to be overcome were: the presence of parasitic elements in the measurement circuit, the design of a probe-card system, and the development of user-friendly system software.
Keywords :
Admittance; Capacitance; Electron devices; Equations; Frequency measurement; Impedance; Integrated circuit modeling; Pins; Probes; Testing;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23062
