Title :
The effect of emitter current crowding on CMOS latchup characteristics
Author_Institution :
VLSI Technology, Inc., San Jose, CA
fDate :
7/1/1987 12:00:00 AM
Abstract :
Both static latchup and intrinsic p-n-p bipolar characteristics are compared and analyzed for various p-n-p-n test structures using a modern p-epi on p+CMOS technology. By varying the epi-layer thickness and the lateral spacing between the p+injector and the n-well boundary, it is shown that high-level injection and current crowding dominate the carrier transport inside the well under latchup conditions, especially when a shallow epi layer is used. As a result, a guideline for latchup-related design rules, applicable for large devices, which combines good latchup protection and a negligible penalty in area of performance, is proposed and discussed.
Keywords :
CMOS process; CMOS technology; Contact resistance; Epitaxial layers; Guidelines; Protection; Proximity effect; Substrates; Testing; Very large scale integration;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23115