Title :
Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers
Author :
Gaudó, Maria Villarroya ; Abadal, Gabriel ; Verd, Jaume ; Teva, Jordi ; Pérez-Murano, Francesc ; Costa, Eduardo Figueras ; Montserrat, Josep ; Uranga, Arantxa ; Esteve, Jaume ; Barniol, Núria
Author_Institution :
Univ. Autonoma de Barcelona, Barcelona
Abstract :
The time-resolved evaporation rate of small glycerine drops (in the attoliter range) is determined by means of a mass sensor based on a resonant cantilever integrated in a CMOS chip. The cantilever is fabricated on crystalline silicon, using silicon-on-insulator (SOI) substrates for the integration of the CMOS-MEMS. Glycerine drops are deposited at the free end of the cantilever. The high mass sensitivity of the sensor (8 ag/Hz) allows to determine the evaporation rate for glycerine drops smaller than 500 aL, which are found to be below 3.2 aL/s in volume or 4 fg/s in mass.
Keywords :
CMOS integrated circuits; cantilevers; drops; evaporation; microsensors; silicon; silicon-on-insulator; MEMS; attoliter glycerine drops; on-chip CMOS mass sensors; resonant silicon micro cantilevers; silicon-on-insulator substrates; time-resolved evaporation rate; Biological control systems; Biosensors; Chemical and biological sensors; Control systems; Crystallization; Printing; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon on insulator technology; Attoliter; CMOS-MEMS; cantilever based mass sensor; dynamics of evaporation; evaporation rate;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2007.901477
