Co-Induced Low-Temperature Silicidation of Ni Germanosilicide Using NiPt Alloy and the Effect of Ge Ratio on Thermal Stability

Author

Yun, Jang-Gn ; Oh, Soon-Young ; Huang, Bin-Feng ; Kim, Yong-Jin ; Ji, Hee-Hwan ; Kim, Yong-Goo ; Park, Sung-Hyung ; Lee, Heui-Seung ; Kim, Dae-Byung ; Kim, Ui-Sik ; Cha, Han-Seob ; Hu, Sang-Bum ; Lee, Jeong-Gun ; Lee, Hi-Deok

Author_Institution

Chungnam Nat. Univ., Daejeon

Volume

6

Issue

5

fYear

2007

Firstpage

485

Lastpage

491

Abstract

In this paper, novel Ni germanosilicide technology using NiPt alloy and Co overlayer has been proposed. Using the Co overlayer after NiPt deposition on Si_1-xGe_x, the formation temperature of low resistive Ni germanosilicide is lowered with high thermal stability. The thermal stability of Ni germanosilicide with different Ge fraction in is also characterized. The sheet resistance degrades as increasing the Ge fraction (x) in Si_1-xGe_x when NiPt/TiN is used. However, using the Co overlayer, the sheet resistance property among Ni germanosilicide formed with different Ge fraction is improved greatly compared with those of NiPt/TiN case (without Co overlayer). Therefore, low-temperature formation of highly thermal robust Ni germanosilicide can be achieved through the NiPt/Co/TiN tri-layer.

Keywords

Ge-Si alloys; annealing; electrical resistivity; nanostructured materials; nanotechnology; nickel compounds; thermal stability; NiPt-Co-TiN interface; NiSiGe; cobalt overlayer; cobalt-induced low-temperature silicidation; nickel germanosilicide; sheet resistance; thermal stability; Cobalt alloys; Germanium alloys; Nickel alloys; Robustness; Silicidation; Temperature; Thermal degradation; Thermal resistance; Thermal stability; Tin; Co overlayer; Ge fraction (${x}$) and CILOS_NP technology; Ni germanosilicide; NiPt alloy; NiPt/Co/TiN tri-layer; SiGe; salicide; thermal stability;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2007.897083

Filename

4301402