DocumentCode
1118737
Title
IIIB-4 a super self-aligned high-speed CMOS technology
Author
Tzu-Yin Chiu ; Voshchenkov, A.M. ; Chin, Gillian M. ; Lee, K.F. ; Hanson, R.C. ; Morris, M.D.
Volume
34
Issue
11
fYear
1987
fDate
11/1/1987 12:00:00 AM
Firstpage
2366
Lastpage
2367
Keywords
CMOS technology; Delay; Fabrication; MOS devices; Parasitic capacitance; Plasma chemistry; Plasma devices; Plasma materials processing; Plasma temperature; Ring oscillators;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.23271
Filename
1486982
Link To Document