Title :
IVB-2 memory effect and enhanced conductivity in Si-implanted thermally grown SiO2
Author :
Kalnitsky, Alex ; King, M.I.H. ; Boothroyd, A.R. ; Ellul, J.P.
fDate :
11/1/1987 12:00:00 AM
Keywords :
Annealing; Contacts; Dielectrics; EPROM; Electron traps; Material storage; Nonvolatile memory; Optical refraction; Thermal conductivity; Thermal stresses;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1987.23286
