DocumentCode
1119285
Title
VIB-7 Optimization of LDD MOSFET´s using coupled 2-D simulations
Author
Husain, Anis ; Mathur, R. ; Wu, Shiqian
Volume
34
Issue
11
fYear
1987
fDate
11/1/1987 12:00:00 AM
Firstpage
2386
Lastpage
2386
Keywords
Anisotropic magnetoresistance; Boron; CMOS technology; Capacitance; Computational modeling; Computer simulation; Degradation; Etching; Implants; Superconductivity;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1987.23322
Filename
1487033
Link To Document