A Fully Integrated Ring-Type Fluxgate Sensor Based on a Localized Core Saturation Method

This paper reports a new micromachined fluxgate sensor with extremely low power consumption, based on a localized core saturation method. The extremely low power consumption is achieved by quick saturation at the localized core region associated with sensing coils 10 times smaller than the excitation coils. We designed and optimized the sensor by using the electromagnetic simulation software MagNet, and we compared the simulation results with the experimental results. The device exhibits a power consumption of ~14 mW, a sensitivity of 650 V/T at 60 muT, and a sensor span of ~200 muT. In comparison with previously reported micro fluxgate sensors, the newly developed sensor consumes 7 times less power, but at the expense of sensor span and linearity