DocumentCode
1120015
Title
The amorphous Si/SiC heterojunction color-sensitive phototransistor
Author
Chang, Chun-Yen ; Chun-Yen Chang ; Fang, Y.K. ; Jwo, S.C.
Author_Institution
National Cheng Kung University, Taiwan, Republic of China
Volume
8
Issue
2
fYear
1987
fDate
2/1/1987 12:00:00 AM
Firstpage
64
Lastpage
65
Abstract
An amorphous Si/SiC heterojunction color-sensitive phototransistor was successfully fabricated by plasma-enhanced chemical vapor deposition. The structure is glass/ITO/a-Si(n+-i)/a-SiC(p+-i-n+)/Al. The device is a bulk barrier transistor with wide-bandgap amorphous SiC emitter and base. The phototransistor revealed a very high optical gain of 40 and a response speed of 10 µs at an input light power of 5 µW and a collector current of 0.12 mA at a voltage of 14 V. The peak response occurs at 610 nm under 1-V bias and changes to 420 and 540 nm under 7- and 13-V biases, respectively.
Keywords
Amorphous materials; Chemical vapor deposition; Glass; Heterojunctions; Indium tin oxide; Phototransistors; Plasma chemistry; Plasma devices; Silicon carbide; Stimulated emission;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/EDL.1987.26553
Filename
1487103
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