DocumentCode :
1121482
Title :
The correct equivalent box representation for the buried layer of BC MOSFET´s in terms of the implantation parameters
Author :
Karmalkar, S. ; Bhat, K.N.
Author_Institution :
Indian Institute of Technology, Madras, India
Volume :
8
Issue :
10
fYear :
1987
Firstpage :
457
Lastpage :
459
Abstract :
From the charge-voltage considerations, it is shown that the Gaussian-implanted profile of buried layers can be correctly represented by an equivalent box. The paper also shows that the average doping and the depth of this box can be obtained directly from a knowledge of the implantation parameters.
Keywords :
Capacitance; Channel bank filters; Design automation; Doping profiles; Gaussian processes; MOSFET circuits; Parameter extraction; Very large scale integration; Voltage;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/EDL.1987.26693
Filename :
1487243
Link To Document :
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