Title :
A new technology for fast switching circuits on glass
Author :
Van Calster, A. ; De Rycke, I. ; Vervaet, A. ; De Baets, J. ; Vanfleteren, Jan
Author_Institution :
Ghent State University, Ghent, Belgium
fDate :
10/1/1987 12:00:00 AM
Abstract :
A low-temperature self-aligned photolithographic process is described to fabricate fast switching digital poly-CdSe thin-film transistors (TFT´s) on glass, The use of sintered CdSe-In2Se3mixtures as an evaporation source for the semiconductor resulted in TFT´s with attractive static and dynamic characteristics. The measured inverter delay for a 20-µm technology was 75 ns.
Keywords :
Annealing; Delay; Glass; Insulation; Inverters; Semiconductor device doping; Semiconductor films; Substrates; Switching circuits; Thin film transistors;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/EDL.1987.26700
