• DocumentCode
    1121557
  • Title

    A new technology for fast switching circuits on glass

  • Author

    Van Calster, A. ; De Rycke, I. ; Vervaet, A. ; De Baets, J. ; Vanfleteren, Jan

  • Author_Institution
    Ghent State University, Ghent, Belgium
  • Volume
    8
  • Issue
    10
  • fYear
    1987
  • fDate
    10/1/1987 12:00:00 AM
  • Firstpage
    477
  • Lastpage
    479
  • Abstract
    A low-temperature self-aligned photolithographic process is described to fabricate fast switching digital poly-CdSe thin-film transistors (TFT´s) on glass, The use of sintered CdSe-In2Se3mixtures as an evaporation source for the semiconductor resulted in TFT´s with attractive static and dynamic characteristics. The measured inverter delay for a 20-µm technology was 75 ns.
  • Keywords
    Annealing; Delay; Glass; Insulation; Inverters; Semiconductor device doping; Semiconductor films; Substrates; Switching circuits; Thin film transistors;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/EDL.1987.26700
  • Filename
    1487250
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1121557