Title :
Detection Technique With Alpha-Tracking and Emissivity Comparison
Author :
Mori, Hisamichi ; Uemura, Toshifumi ; Matsuyama, Hiroki ; Yamazaki, Tsutomu ; Soeda, Takeshi
Author_Institution :
Fujitsu Semicond. Ltd., Tokyo, Japan
Abstract :
We achieved accurate alpha emissivity measurement with the alpha-tracking technique by decreasing the background effect. It is possible to lower the detection limit of this technique to 4.9×10-2 alphas/kh-cm2 using a normal detector. We measured various large-scale integration materials using this technique.
Keywords :
alpha-particle effects; alpha emissivity measurement; alpha-tracking; background effect; detection limit; detection technique; emissivity comparison; large-scale integration materials; Alpha particles; Radiation detectors; Resins; Sensitivity; Single event upsets; Alpha-emissivity; Columbia resin 39 (CR-39); alpha-tracking; low background;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.2014.2359472
