DocumentCode :
1122070
Title :
Characteristics of High- 
Josephson Junction Fabricated by Focused Ion Beam and Ion Damage
Author :
Wu, Chiu-Hsien ; Kuo, Wei-Cheng ; Chou, Yu-Te ; Chen, Jau-Han ; Yang, Hong-Chang
Author_Institution :
Dept. of Phys., Nat. Chung Hsing Univ., Taichung, Taiwan
Volume :
19
Issue :
3
fYear :
2009
fDate :
6/1/2009 12:00:00 AM
Firstpage :
210
Lastpage :
213
Abstract :
A high-Tc Josephson junction and superconducting quantum interference devices (SQUIDs) were fabricated by focused ion beam (FIB) milling and 150 keV oxygen ion implantation. A single layer gold mask with a small aperture of 28-73 nm defined by direct milling with FIB, was used. The voltage versus current characteristics of high-Tc YBa2Cu3O7-x Josephson junctions were measured under microwaves. Shapiro steps were observed in the single junction. The voltage versus current and voltage versus magnetic field characteristics of a SQUID were measured.
Keywords :
SQUIDs; barium compounds; focused ion beam technology; high-temperature superconductors; ion implantation; yttrium compounds; Shapiro steps; YBa2Cu3O7-x; focused ion beam milling; high- Tc Josephson junction; ion implantation; superconducting quantum interference devices; Focused ion beam; Josephson junction; SQUID; ion implantation;
fLanguage :
English
Journal_Title :
Applied Superconductivity, IEEE Transactions on
Publisher :
ieee
ISSN :
1051-8223
Type :
jour
DOI :
10.1109/TASC.2009.2018366
Filename :
5153032
Link To Document :
