• DocumentCode
    1122070
  • Title

    Characteristics of High- T_{\\rm c} Josephson Junction Fabricated by Focused Ion Beam and Ion Damage

  • Author

    Wu, Chiu-Hsien ; Kuo, Wei-Cheng ; Chou, Yu-Te ; Chen, Jau-Han ; Yang, Hong-Chang

  • Author_Institution
    Dept. of Phys., Nat. Chung Hsing Univ., Taichung, Taiwan
  • Volume
    19
  • Issue
    3
  • fYear
    2009
  • fDate
    6/1/2009 12:00:00 AM
  • Firstpage
    210
  • Lastpage
    213
  • Abstract
    A high-Tc Josephson junction and superconducting quantum interference devices (SQUIDs) were fabricated by focused ion beam (FIB) milling and 150 keV oxygen ion implantation. A single layer gold mask with a small aperture of 28-73 nm defined by direct milling with FIB, was used. The voltage versus current characteristics of high-Tc YBa2Cu3O7-x Josephson junctions were measured under microwaves. Shapiro steps were observed in the single junction. The voltage versus current and voltage versus magnetic field characteristics of a SQUID were measured.
  • Keywords
    SQUIDs; barium compounds; focused ion beam technology; high-temperature superconductors; ion implantation; yttrium compounds; Shapiro steps; YBa2Cu3O7-x; focused ion beam milling; high- Tc Josephson junction; ion implantation; superconducting quantum interference devices; Focused ion beam; Josephson junction; SQUID; ion implantation;
  • fLanguage
    English
  • Journal_Title
    Applied Superconductivity, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1051-8223
  • Type

    jour

  • DOI
    10.1109/TASC.2009.2018366
  • Filename
    5153032