Title :
Fabrication of high-Tc Josephson effect devices by natural lithography
Author :
Dozier, W.D. ; Daly, K.P. ; Hu, R. ; Platt, C.E. ; Wire, M.S.
Author_Institution :
TRW, Redondo Beach, CA, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
Thin films of YBa2Cu3O7 (YBCO) have been deposited on LaAlO3 substrates previously textured with submicron features by the use of natural lithography (the use of monolayers of polystyrene microspheres as lithographic masks). This weakens the superconducting properties, due to reduced connectivity in the film. Devices fabricated using localized textured regions have shown Josephson coupling. Weak links have shown Shapiro steps at the expected voltage intervals. Magnetic-field-induced modulation in the detected RF voltage with the geometrically correct periodicity has been observed in RF SQUIDs over a limited temperature range
Keywords :
barium compounds; high-temperature superconductors; lanthanum compounds; substrates; superconducting junction devices; yttrium compounds; Josephson coupling; LaAlO3 substrates; RF SQUIDs; RF voltage; Shapiro steps; YBa2Cu3O7-LaAlO3; high temperature superconductors; high-Tc Josephson effect devices; localized textured regions; magnetic field induced modulation; monolayers of polystyrene microspheres; natural lithography; reduced connectivity; submicron features; textured substrates; weak links; Fabrication; Lithography; Magnetic films; Radio frequency; Sputtering; Substrates; Superconducting films; Superconducting magnets; Voltage; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
