Focused Ion Beam NanoSQUIDs as Novel NEMS Resonator Readouts

Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. In this paper we report proposals and calculations for novel methods for excitation and readout of cantilever-style NEMS resonators which are applicable over a wide temperature range. We suggest a Lorentz force-based excitation method and discuss an ultrasensitive readout provided by a nanoSQUID, where the cantilever vibration modulates the inductance of the nanoSQUID loop, allowing potentially sub-picometer amplitude sensitivity to be achieved.