DocumentCode :
1122861
Title :
Surface Modification of Thin Rods by Theta-Pinching Metallic Plasmas
Author :
Takeuchi, Nozomi ; Yasuoka, Koichi ; Ishii, Shozo
Author_Institution :
Tokyo Inst. of Technol.
Volume :
34
Issue :
4
fYear :
2006
Firstpage :
1112
Lastpage :
1115
Abstract :
Metallic-ion deposition on the surface of a thin dielectric rod is successfully demonstrated by using a small theta-pinch device. This method needs no application of a negative potential and has few limits on the surface irregularities of the treatment objects. A single-turn coil surrounding a glass tube of 16.6 mm in inner diameter is excited by a capacitor discharge circuit. Nitrogen gas is filled up to 10 Pa and pre-ionized before triggering the capacitor discharge. The plasma is concentrated and expanded repeatedly with the coil current of 15-kA peak and 1.54-mus periods. Through the interaction between the expanding plasma and a metalized film placed at the inner wall of the tube, the metallic ions are generated and introduced into the pinching plasma and utilized for deposition. The pinching time of the plasma is around 0.25 mus obtained from a streak photograph. Polytetrafluoroethylene rods of 3 mm in diameter are placed at the center of the tube and exposed to the pinching plasma. An electron-probe microanalyzer analysis shows that the thickness of a deposited gold is around 10 mum after 400 shots of the discharges
Keywords :
electron probe analysis; gold; pinch effect; plasma deposition; plasma immersion ion implantation; plasma-wall interactions; polymers; rods (structures); surface treatment; 1.54 mus; 10 Pa; 15 kA; 16.6 mm; 3 mm; Au; capacitor discharge circuit; electron-probe microanalyzer; glass tube; metallic-ion deposition; polytetrafluoroethylene rods; single-turn coil; streak photograph; surface modification; theta-pinching metallic plasmas; thin dielectric rod; Capacitors; Circuits; Coils; Dielectric devices; Electron tubes; Glass; Plasma applications; Plasma devices; Surface discharges; Surface treatment; Metallic plasma; plasma-based ion implantation; theta-pinch plasma;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2006.876484
Filename :
1673493
Link To Document :
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