Title :
DLC Film Fabrication on the Inner Surface of a Cylinder by Carbon Ion Implantation
Author :
Wang, Yuhang ; Wang, Langping ; Yu, Yonghao ; Mu, Kuifeng ; Wang, Xiaofeng
Author_Institution :
Sch. of Mater. Sci & Eng., Harbin Inst. of Technol.
Abstract :
To synthesize good diamond-like carbon (DLC) films on the inner surface of a cylinder, C2H2 plasma should be generated uniformly in the cylinder. In this study, glow discharge C2H2 plasma was generated by a high pulsed bias voltage applied on the cylinder, and ions were accelerated and implanted into the sample by the same bias. The effect of pulse frequency of the bias and working pressure on the discharge characteristics was investigated. In addition, the ball-on-disk test and Raman spectroscopy were used to characterize the as-deposited DLC films. The test results show that wear resistance of samples increases with the applied voltage, and the friction coefficient of DLC films lies in the range of 0.15-0.20
Keywords :
Raman spectra; diamond-like carbon; friction; glow discharges; plasma density; plasma deposited coatings; plasma deposition; plasma immersion ion implantation; plasma sources; wear resistance; wear resistant coatings; C; DLC film fabrication; Raman spectroscopy; ball-on-disk test; bias pulse frequency; carbon ion implantation; cylinder inner surface modification; diamond-like carbon film; friction coefficient; glow discharge C2H2 plasma; high pulsed bias voltage; plasma density; plasma immersion ion implantation; wear resistance; working pressure; Diamond-like carbon; Fabrication; Glow discharges; Ion implantation; Plasma accelerators; Plasma immersion ion implantation; Plasma properties; Surface discharges; Testing; Voltage; Diamond-like carbon (DLC) film; inner surface modification; plasma immersion ion implantation (PIII); wear resistance;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.877503
