Title :
Novel Microrobots and Micromotors Using Lorentz Force Driven Linear Microactuators Based on Polymer Magnets
Author :
Feldmann, M. ; Büttgenbach, S.
Author_Institution :
Tech. Univ. of Braunschweig, Braunschweig
Abstract :
This paper reports on the development of several novel microelectromechanical systems (MEMS) machines based on linear Lorentz force actuators. These were monolithically fabricated and include micromachined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape, and properties. By combining these linear actuators with mechanical compliant structures using Epon SU-8, we were able to build in-plane and out-of-plane micropositioners, micromotors, and microgrippers.
Keywords :
grippers; microactuators; micromotors; micropositioning; microrobots; permanent magnet motors; permanent magnets; Epon SU-8; Lorentz force driven linear microactuators; in-plane micropositioners; mechanical compliant structures; microelectromechanical system machines; microgrippers; micromachined polymer magnets; micromotors; microrobots; out-of-plane micropositioners; Hydraulic actuators; Lorentz covariance; Magnetic properties; Magnets; Microactuators; Microelectromechanical systems; Micromechanical devices; Micromotors; Polymers; Shape; Microactuators; micromotors; microrobots; polymermagnets;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2007.897052
