Exchange-Coupled IrMn/CoFe Mulitlayers for RF-Integrated Inductors

The high-frequency characteristics of the RF integrated inductors with antiferromagnetic/ferromagnetic (AF/F) multilayers (MLs) are studied. Each AF layer is 8-nm IrMn and F is Co₅₀Fe₅₀ with a 200-nm splitting into N = 1 to 5 repeats of MLs. This exchange coupled {IrMn/CoFe(d nm)}_N MLs are deposited on top of the two-port inductors with five-turn square spiral coils, a dimension of 100 mum times 100 mum and line/space of 5 mum/2 mum. The inductor surface and magnetic layer is separated by 1-mum-thick SiO₂. The enhancement of inductance (DeltaL) is 20% compared to an air-core of the same coil size. The resonance peak gradually shifted to a higher frequency with increasing N, and reached at a maximum of 4.3 GHz when N = 5. This is in good agreement with our magnetic data which revealed that the anisotropy field (H_k) and ferromagnetic resonance frequency (f_FMR) of {IrMn/CoFe(d nm)}_N MLs are increased with increasing N. The quality factor, Q is improved by 6.8% at 1.5 GHz for the {IrMn/CoFe(40 nm)}_N=5 integrated inductors compared to air-core inductors.