DocumentCode :
1123045
Title :
Ion Extraction From Magnetically Driven Carbon Shunting Arc Plasma
Author :
Takaki, Koichi ; Kumagai, Osamu ; Mukaigawa, Seiji ; Fujiwara, Tamiya ; Yukimura, Ken
Author_Institution :
Dept. of Electr. & Electron. Eng., Iwate Univ., Morioka
Volume :
34
Issue :
4
fYear :
2006
Firstpage :
1209
Lastpage :
1215
Abstract :
Shunting arc discharge is a pulsed plasma source of metals and semimetal materials and is ignited without any trigger sources at a wide range of gas pressures, from vacuum to atmospheric pressure under identical discharge conditions. In this paper, an ion extraction from magnetically driven carbon shunting arc discharge and a criterion of the arc ignition are described. A carbon rod with a diameter of 2 mm and a length of 40 mm was employed for arc ignition. The carbon rod was set in the vacuum and was initially heated up with a pulsed current supplied by a charged capacitor with a capacitance of 20 muF, followed by self-ignition. The heating energy is almost independent of the charging voltage of the capacitor and changes with the rod position on the rail. The ions are extracted from the arc plasma by applying a negative pulse voltage to a target. The target current has a sharp peak at the initial stage, followed by a stationary state. The stationary current decreases with increasing the distance to the target from a muzzle of the shunting arc plasma gun. Under the assumption of a collisionless ion sheath, the ion density at a 20-mm target-muzzle distance is estimated as 1times10 8 and 2times107 cm-3 for the delay times of 250 and 1000 mus, respectively. The density at a 250-mus delay time decreases from 1times108 to 0.8times108 cm-3 by increasing the distance from 20 to 140 mm. The ion density increases as the charging voltage of the capacitor for arc generation is increased
Keywords :
arcs (electric); carbon; plasma density; plasma guns; plasma heating; plasma sheaths; plasma sources; 2 mm; 20 muF; 20 to 140 mm; 250 to 1000 mus; 40 mm; C; arc ignition; atmospheric pressure; carbon shunting arc plasma; charged capacitor; collisionless ion sheath; heating energy; ion density; ion extraction; magnetically driven plasma; negative pulse voltage; plasma gun; pulsed plasma source; semimetal materials; shunting arc discharge; stationary current; Arc discharges; Atmospheric-pressure plasmas; Capacitors; Delay estimation; Ignition; Inorganic materials; Magnetic materials; Plasma materials processing; Plasma sources; Voltage; Carbon; ion current; ion extraction; magnetically driven; plasma-based ion implantation (PBII); shunting arc;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2006.877633
Filename :
1673509
Link To Document :
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