DocumentCode
1124116
Title
Tunable MEMS LC resonator with large tuning range
Author
Yu, A.B. ; Liu, A.Q. ; Zhang, Q.X.
Author_Institution
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
Volume
41
Issue
15
fYear
2005
fDate
7/21/2005 12:00:00 AM
Firstpage
855
Lastpage
857
Abstract
A tunable resonator based on MEMS technology is reported. The resonator is a parallel LC type resonator, in which the capacitor is made up of two metal bridges and the inductor is made up of a shorted stub. The length of the shorted stub is changed by shunt DC contact switches and therefore inductance values of the resonator can be varied. As a result, the resonant frequency of the resonator can be shifted from 8 to 14 GHz with 75% tunable range. The whole size of the resonator is 6×0.9 mm2.
Keywords
coplanar waveguide components; micromachining; micromechanical resonators; tuning; 0.9 mm; 6 mm; 8 to 14 GHz; CPW transmission line; coplanar waveguide transmission line; large tuning range; parallel LC type resonator; resonant frequency; shorted stub; shunt DC contact switches; surface micromachining technology; tunable MEMS resonator;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20051497
Filename
1487748
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