Title :
Tunable MEMS LC resonator with large tuning range
Author :
Yu, A.B. ; Liu, A.Q. ; Zhang, Q.X.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
fDate :
7/21/2005 12:00:00 AM
Abstract :
A tunable resonator based on MEMS technology is reported. The resonator is a parallel LC type resonator, in which the capacitor is made up of two metal bridges and the inductor is made up of a shorted stub. The length of the shorted stub is changed by shunt DC contact switches and therefore inductance values of the resonator can be varied. As a result, the resonant frequency of the resonator can be shifted from 8 to 14 GHz with 75% tunable range. The whole size of the resonator is 6×0.9 mm2.
Keywords :
coplanar waveguide components; micromachining; micromechanical resonators; tuning; 0.9 mm; 6 mm; 8 to 14 GHz; CPW transmission line; coplanar waveguide transmission line; large tuning range; parallel LC type resonator; resonant frequency; shorted stub; shunt DC contact switches; surface micromachining technology; tunable MEMS resonator;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20051497
