Title :
Stacked dual-oxide MOS energy band diagram visual representation program (IRW student paper)
Author :
Southwick, Richard G. ; Knowlton, William B.
Author_Institution :
Dept. of Electr. & Comput. Eng., Boise State Univ., ID
fDate :
6/1/2006 12:00:00 AM
Abstract :
Energy band diagrams for MOS devices are essential for understanding device performance and reliability. Introduction of high-k gate stacks with a silicon dioxide (SiO2) interfacial layer requires an even greater understanding of the energy band behavior. A program that quickly determines the band diagrams based on a simple analytical model was created. It is used to explore the behavior of various oxide stacks with the ability to easily vary important parameters like oxide material, electron affinity, bandgap, dielectric constant, and thickness. The usefulness of this program to predict potential reliability issues is also demonstrated
Keywords :
MIS devices; band structure; semiconductor device models; semiconductor device reliability; silicon compounds; MOS devices; SiO2; device reliability; energy band diagrams; high-k gate stacks; interfacial layer; silicon dioxide; visual representation program; Analytical models; Dielectric constant; Dielectric materials; Electric potential; Electrons; Hafnium oxide; MOS devices; Photonic band gap; Tunneling; Voltage; Dual oxide; MOS; energy band; high-; reliability;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2006.876971