Title :
Fabrication of Eu1Ba2Cu3Oy thin films and tunnel junctions by magnetron sputtering
Author :
Asano, H. ; Yonezawa, H. ; Asahi, M. ; Michikami, O.
Author_Institution :
NTT Appl. Electron. Lab., Ibaraki, Japan
fDate :
3/1/1991 12:00:00 AM
Abstract :
Epitaxial Eu1Ba2Cu3Oy (EBCO) thin films have been grown in situ on SrTiO3 and MgO (001) by DC magnetron sputtering from a stoichiometric sintered target. The controllable production of films with a particular orientation is found to be possible through the sputtering process. A high degree of crystalline quality for purely a-axis-oriented films on SrTiO 3 (001) is revealed by 4-axis gonio-X-ray diffraction and Rutherford backscattering spectrometry (RBS) study (χmin of 10% for 7-MeV 4He2+ ion channeling). The zero-resistivity transition temperature obtained for completely a -axis-oriented film is 88 K, while it is 93 K for c-axis-oriented film. Tunnel junctions are fabricated using in situ deposited EBCO/Au/MgO/Nb structures and a photolithographic technique. The in situ grown, smooth films with the a-axis normal to the surfaces yield tunnel junctions which exhibit Josephson-like behavior. Critical current modulation is observed in response to an applied magnetic field
Keywords :
Josephson effect; Rutherford backscattering; X-ray diffraction examination of materials; barium compounds; europium compounds; high-temperature superconductors; sputtered coatings; superconducting thin films; superconducting transition temperature; superconductive tunnelling; 88 K; 93 K; DC magnetron sputtering; Eu1Ba2Cu3Oy thin films; Josephson-like behavior; MgO; Rutherford backscattering spectrometry; SrTiO3; controllable production; crystalline quality; gonio-X-ray diffraction; high temperature superconductor; magnetron sputtering; stoichiometric sintered target; tunnel junctions; zero-resistivity transition temperature; Backscatter; Crystallization; Diffraction; Fabrication; Gold; Helium; Production; Spectroscopy; Sputtering; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
