DocumentCode :
1125379
Title :
A Low-Voltage Planar Power MOSFET With a Segmented JFET Region
Author :
Ng, Jacky C W ; Sin, Johnny K O
Author_Institution :
Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China
Volume :
56
Issue :
8
fYear :
2009
Firstpage :
1761
Lastpage :
1766
Abstract :
A new low-voltage planar power MOSFET with a segmented junction field effect transistor (JFET) region is proposed and demonstrated in this paper. The segmented JFET region consists of alternating n- and p-regions formed by using ion implantation, and it is fully depleted before the drain-source breakdown voltage is reached to provide a high breakdown voltage. The new planar power MOSFET allows a smaller gate-drain overlap area, a shallower p-body, and a JFET region with a doping concentration higher than those of the conventional vertical double-diffused MOSFETs (VDMOSFETs). The new structure with a breakdown voltage of 34 V is fabricated by using a 0.5-mum technology and is compared with the conventional VDMOSFET. The gate-drain charge density and the figure-of-merit are improved by 51% and 48%, respectively. However, the specific on-resistance of the device is increased by 5% due to the smaller conducting area in the segmented JFET region. Simulation results show that the figure-of-merit of the new structure is very favorable compared to those of commercial devices at the same voltage rating.
Keywords :
ion implantation; junction gate field effect transistors; low-power electronics; power MOSFET; semiconductor doping; doping concentration; drain-source breakdown voltage; figure-of-merit; gate-drain charge density; ion implantation; low-voltage planar power MOSFET; p-body region; segmented junction field effect transistor region; size 0.5 mum; specific on-resistance; vertical double-diffused MOSFET; voltage 34 V; Breakdown voltage; Doping; Electric breakdown; FETs; Helium; Immune system; Ion implantation; MOSFET circuits; Power MOSFET; Power transistors; Silicon compounds; Voltage; Gate–drain charge; on-resistance; planar power MOSFET; vertical double-diffused MOSFET (VDMOSFET);
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2009.2024105
Filename :
5153351
Link To Document :
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