Title :
Properties of superconducting YBa2Cu3O7-δ time films made at high deposition rates
Author :
Wu, X.D. ; Muenchausen, R.E. ; Foltyn, S.R. ; Estler, R.C. ; Nogar, N.S. ; Rollett, A.D. ; Chang, C.C. ; England, P. ; Ramesh, R. ; Hwang, D.M. ; Ravi, T.S.
Author_Institution :
Los Alamos Nat. Lab., NM, USA
fDate :
3/1/1991 12:00:00 AM
Abstract :
High Tc and Jc YBa2Cu3O7-δ, thin films were prepared by pulsed laser deposition using deposition rates up to 145 Å/s. It is demonstrated that the deposition rate is one of the important processing parameters for preparation of high-temperature superconducting thin films. At high deposition rates, outgrowths were found on the film surfaces as a result of island growth at the processing temperature needed for good film growth. It is concluded that smooth films can be deposited by choosing the right deposition temperature and deposition rate so that the film coalesces at the final thickness
Keywords :
barium compounds; high-temperature superconductors; laser beam applications; vapour deposition; yttrium compounds; deposition temperature; film surfaces; high deposition rates; high temperature superconductor; island growth; outgrowths; pulsed laser deposition; superconducting YBa2Cu3O7-δ time films; Electrical resistance measurement; Magnetic field measurement; Magnetic films; Scanning electron microscopy; Sputtering; Superconducting films; Temperature measurement; Transmission electron microscopy; X-ray diffraction; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
