Title :
Time-Resolved Optical Imaging of an AC Magnetron Discharge
Author :
Clarke, Gregory C B ; Kelly, Peter J. ; Bradley, James W.
Author_Institution :
Dept. of Electr. Eng. & Electron., Univ. of Liverpool, Liverpool
Abstract :
Magnetron sputtering has proved to be an important and versatile technique for the production of thin films. In this paper, time-resolved optical imaging has been used to investigate the effect of an alternating-current (ac) waveform on plasma emission. The results suggest the formation of a secondary discharge, during the positive half of the pulse cycle, that is adjacent to the magnetron´s anode.
Keywords :
high-frequency discharges; plasma diagnostics; AC magnetron discharge; alternating-current waveform; magnetron sputtering; plasma emission; secondary discharge; thin films; time-resolved optical imaging; Imaging; magnetrons; plasma applications;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2008.920287
