Title :
Single-step buried waveguides in glass by field-assisted copper ion-exchange
Author_Institution :
Dept. of Microelectron. Technol., V.I. Ulyanov Electrotech. Inst., Leningrad, USSR
Abstract :
Symmetric profile buried waveguides can be fabricated in glass by single-step electromigration of Cu2+ ions from thin solid films. The theory of this process is given. The controllable process needs a molten multi-ionic anode to keep the glass surface background composition unchanged.
Keywords :
electromigration; integrated optics; ion exchange; optical glass; optical waveguides; optical workshop techniques; Cu 2+ ions; buried waveguides; controllable process; field assisted ion exchange; glass; integrated optics; molten multi-ionic anode; multiionic anode; single-step electromigration; symmetric profile waveguides; thin solid films;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19900025
