• DocumentCode
    1127168
  • Title

    Single-step buried waveguides in glass by field-assisted copper ion-exchange

  • Author

    Gevorgyan, S S

  • Author_Institution
    Dept. of Microelectron. Technol., V.I. Ulyanov Electrotech. Inst., Leningrad, USSR
  • Volume
    26
  • Issue
    1
  • fYear
    1990
  • Firstpage
    38
  • Lastpage
    39
  • Abstract
    Symmetric profile buried waveguides can be fabricated in glass by single-step electromigration of Cu2+ ions from thin solid films. The theory of this process is given. The controllable process needs a molten multi-ionic anode to keep the glass surface background composition unchanged.
  • Keywords
    electromigration; integrated optics; ion exchange; optical glass; optical waveguides; optical workshop techniques; Cu 2+ ions; buried waveguides; controllable process; field assisted ion exchange; glass; integrated optics; molten multi-ionic anode; multiionic anode; single-step electromigration; symmetric profile waveguides; thin solid films;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19900025
  • Filename
    44861
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1127168