• DocumentCode
    1127756
  • Title

    A Continuous Murphy´s Integral

  • Author

    Nadarajah, Saralees

  • Author_Institution
    Sch. of Math., Univ. of Manchester, Manchester, UK
  • Volume
    22
  • Issue
    3
  • fYear
    2009
  • Firstpage
    338
  • Lastpage
    343
  • Abstract
    Murphy´s yield integral is a fundamental tool for modeling defect counts on wafers or chips. In this note, we propose a continuous version of Murphy´s yield integral. We derive some formulas for this continuous version and illustrate four applications.
  • Keywords
    electrical faults; integral equations; network synthesis; chips; continuous Murphy´s yield integral; continuous version; defect counts; wafer; CPU time; Hazard rate function; Murphy´s yield integral; Weibull distribution; gamma distribution; mean residual lifetime function; yield formula;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2009.2025805
  • Filename
    5159413
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1127756