Title :
A Continuous Murphy´s Integral
Author :
Nadarajah, Saralees
Author_Institution :
Sch. of Math., Univ. of Manchester, Manchester, UK
Abstract :
Murphy´s yield integral is a fundamental tool for modeling defect counts on wafers or chips. In this note, we propose a continuous version of Murphy´s yield integral. We derive some formulas for this continuous version and illustrate four applications.
Keywords :
electrical faults; integral equations; network synthesis; chips; continuous Murphy´s yield integral; continuous version; defect counts; wafer; CPU time; Hazard rate function; Murphy´s yield integral; Weibull distribution; gamma distribution; mean residual lifetime function; yield formula;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2009.2025805
