Title :
Laser wet etching of diffraction gratings in GaAs for integrated optics
Author :
Matz, R. ; Matz, Richard
Author_Institution :
Research Laboratories of Siemens AG, Muenchen, Germany
fDate :
7/1/1986 12:00:00 AM
Abstract :
Submicrometer optical gratings with high-aspect ratios were produced in
Keywords :
Holography; Integrated optics; Optical diffraction gratings; Chemical lasers; Diffraction gratings; Gallium arsenide; Holographic optical components; Integrated optics; Laser modes; Optical diffraction; Optical feedback; Optical surface waves; Wet etching;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.1986.1074832
