DocumentCode :
1128080
Title :
Laser wet etching of diffraction gratings in GaAs for integrated optics
Author :
Matz, R. ; Matz, Richard
Author_Institution :
Research Laboratories of Siemens AG, Muenchen, Germany
Volume :
4
Issue :
7
fYear :
1986
fDate :
7/1/1986 12:00:00 AM
Firstpage :
726
Lastpage :
729
Abstract :
Submicrometer optical gratings with high-aspect ratios were produced in
Keywords :
Holography; Integrated optics; Optical diffraction gratings; Chemical lasers; Diffraction gratings; Gallium arsenide; Holographic optical components; Integrated optics; Laser modes; Optical diffraction; Optical feedback; Optical surface waves; Wet etching;
fLanguage :
English
Journal_Title :
Lightwave Technology, Journal of
Publisher :
ieee
ISSN :
0733-8724
Type :
jour
DOI :
10.1109/JLT.1986.1074832
Filename :
1074832
Link To Document :
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