Title :
Optimization of high-speed metal-semiconductor-metal photodetectors
Author :
Burm, J. ; Litvin, Kerry I. ; Schaff, William J. ; Eastman, Lester F.
Author_Institution :
Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA
fDate :
6/1/1994 12:00:00 AM
Abstract :
Circular-aperture Metal-Semiconductor-Metal (MSM) photodetectors have been fabricated in order to decrease the device capacitance. The frequency-response of the MSM photodetectors has been calculated using a first-order approximation. The design of the circular-aperture detectors and conventional square-aperture detectors has been optimized using this approximation. The largest 3 dB bandwidths are obtained with 33 fingers for the circular detectors and 29 for the square detectors. These numbers do not change regardless of the size of the MSM photodetectors.<>
Keywords :
capacitance; high-speed optical techniques; metal-semiconductor-metal structures; photodetectors; MSM photodetectors; bandwidths; capacitance; circular-aperture detectors; fingers; first-order approximation; frequency-response; high-speed metal-semiconductor-metal photodetectors; optimization; square-aperture detectors; Bandwidth; Capacitance measurement; Detectors; Fingers; Frequency response; Geometrical optics; Inductance measurement; Laboratories; Laser beams; Photodetectors;
Journal_Title :
Photonics Technology Letters, IEEE
