Silicondioxide electret films prepared by the sol-gel process

Sol-gel silica electret films were coated on silicon substrates by a spin coating technique. The process of preparing the films is described and the electret behavior of the films is discussed. The films were corona charged at room temperature. Then, isothermal decay of the surface potential at room temperature and open-circuit thermally stimulated discharge (TSD) experiments were carried out. The results showed that the main peak of the TSD current spectra was situated at ~250°C and charge deposited in the film indicated good stability for the negative charged sample. After storage at room temperature for 50 days, the surface potential of the sample still retained at ~90% of the initial value. The authors found activation energies of 1.3 and 0.7 eV for negative and positive corona charged samples. Experimental results suggest that the sol-gel process could be useful in electret and electronic technique applications