Title :
Thermal annealing of He+implanted optical waveguides in LiNbO3
Author :
Naden, J. Mark ; Weiss, Bernard L.
Author_Institution :
University of Surrey, Guildford, Surrey, England
fDate :
9/1/1986 12:00:00 AM
Abstract :
The annealing of He+implanted optical waveguides is required to reduce the damage in the guiding layer of the sample. Results of the effect of this process are presented together with the aging characteristics of these waveguides which are due to room temperature annealing. The effect of sample temperature during implantation is also presented which may be considered as an annealing process occurring during implantation.
Keywords :
Ion implantation; Optical planar waveguides; Planar optical waveguide; Thermal factors; Aging; Annealing; Helium; Implants; Optical attenuators; Optical refraction; Optical variables control; Optical waveguides; Refractive index; Temperature;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.1986.1074900
