DocumentCode :
1128893
Title :
Optical Channel Waveguides in 
Crystal Produced by Proton Implantation
Author :
Tan, Yang ; Chen, Feng ; Wang, Lei ; Wang, Xue-Lin ; Wang, Ke-Ming ; Lu, Qing-Ming
Author_Institution :
Sch. of Phys., Shandong Univ., Jinan
Volume :
26
Issue :
10
fYear :
2008
fDate :
5/15/2008 12:00:00 AM
Firstpage :
1304
Lastpage :
1308
Abstract :
We reported on, to our knowledge the first time, the channel waveguide formation in KTiOPO4 crystal by the implantation of protons with a special designed photoresist mask. The 2-D refractive index profile was constructed according to the measured dark-mode spectroscopy (for longitudinally planar configuration) as well as the shape of the channel waveguide cross section. Based on this index distribution, the modal profile was calculated through a numerical simulation, which showed reasonable agreement with the near-field light intensity distribution of the guided mode that was obtained by an end-coupling method. After annealing at 200deg C for 30 min in air, propagation loss of the channel waveguides was determined to be as low as ~2.9 dB/cm at wavelength of 632.8 nm.
Keywords :
annealing; masks; optical design techniques; optical fabrication; optical losses; optical materials; optical planar waveguides; photoresists; potassium compounds; refractive index; 2-D refractive index profile; KTiOPO4; annealing; channel waveguide crosssection; dark-mode spectroscopy; end-coupling method; longitudinally planar configuration; modal profile; near-field light intensity distribution; optical channel waveguides; photoresist mask design; propagation loss; proton implantation; refractive index distribution; temperature 200 C; time 30 min; wavelength 632.8 nm; $hbox {KTiOPO}_{4}$
fLanguage :
English
Journal_Title :
Lightwave Technology, Journal of
Publisher :
ieee
ISSN :
0733-8724
Type :
jour
DOI :
10.1109/JLT.2008.917769
Filename :
4488229
Link To Document :
