DocumentCode :
1130094
Title :
Electrothermally Activated SU-8 Microgripper for Single Cell Manipulation in Solution
Author :
Chronis, Nikolas ; Lee, Luke P.
Author_Institution :
Dept. of Bioeng., Univ. of California, Berkeley, CA, USA
Volume :
14
Issue :
4
fYear :
2005
Firstpage :
857
Lastpage :
863
Abstract :
The development of a SU-8-based microgripper that can operate in physiological ionic solutions is presented. The electrothermally activated polymer gripper consists of two “hot-and-cold-arm” actuators that are fabricated in a two-mask surface micromachining process. The high thermal expansion coefficient of SU-8 (52 
) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 – 32 
) at low voltages (1–2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions. ![\\hfill \\hbox {[1330]}](/images/tex/14982.gif)
) compared to silicon and metals, allows the actuation of the microgripper with small average temperature elevations (10 – 32 ) at low voltages (1–2 V). The polymer microgripper can be used for the manipulation of single cells and other biological species in solution with minimal undesired interactions. Keywords :
biomedical engineering; grippers; micromachining; micromechanical devices; photoresists; polymers; 1 to 2 V; 10 to 32 C; electrothermally activated SU-8 microgripper; micromachining process; physiological ionic solutions; single cell manipulation; thermal expansion coefficient; Actuators; Cells (biology); Electrothermal effects; Grippers; Low voltage; Micromachining; Polymers; Silicon; Temperature; Thermal expansion; Polymer MEMS; SU-8 actuators; polymer microgripper; single cell manipulation;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2005.845445
Filename :
1492438
Link To Document :
