Title :
Mechanical Coupling in Single Crystal Silicon for MEMS Design
Author :
Govindjee, Sanjay ; Klinkel, Sven
Author_Institution :
Dept. of Civil & Environ. Eng., Univ. of California, Berkeley, CA, USA
Abstract :
There is an active interest in the development of microelectromechanical systems (MEMS) devices using single crystal silicon. Single crystal silicon is known to display anisotropic mechanical properties and several papers have been presented that deal explicitly with various aspects arising from the anisotropy. In this paper we develop comprehensive expressions and graphs to allow for the easy determination of anisotropic coupling effects in beam and plate structures with a particular emphasis upon
Keywords :
beams (structures); mechanical properties; micromechanical devices; plates (structures); silicon; (100) wafers; (111) wafers; 3D behavior; MEMS design; anisotropic coupling effect; anisotropic mechanical property; anisotropic silicon; anisotropic structure; beam structure; mechanical coupling; microelectromechanical system; plate structure; single crystal silicon; Anisotropic magnetoresistance; Crystalline materials; Displays; Mechanical factors; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Optical coupling; Semiconductor device modeling; Silicon; Anisotropic silicon; MEMS design; anisotropic structures; mechanical coupling; microelectromechanical systems (MEMS);
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.845443
