Mechanical Coupling in Single Crystal Silicon for MEMS Design

Author

Govindjee, Sanjay ; Klinkel, Sven

Author_Institution

Dept. of Civil & Environ. Eng., Univ. of California, Berkeley, CA, USA

Volume

14

Issue

4

fYear

2005

Firstpage

864

Lastpage

871

Abstract

There is an active interest in the development of microelectromechanical systems (MEMS) devices using single crystal silicon. Single crystal silicon is known to display anisotropic mechanical properties and several papers have been presented that deal explicitly with various aspects arising from the anisotropy. In this paper we develop comprehensive expressions and graphs to allow for the easy determination of anisotropic coupling effects in beam and plate structures with a particular emphasis upon

Keywords

beams (structures); mechanical properties; micromechanical devices; plates (structures); silicon; (100) wafers; (111) wafers; 3D behavior; MEMS design; anisotropic coupling effect; anisotropic mechanical property; anisotropic silicon; anisotropic structure; beam structure; mechanical coupling; microelectromechanical system; plate structure; single crystal silicon; Anisotropic magnetoresistance; Crystalline materials; Displays; Mechanical factors; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Optical coupling; Semiconductor device modeling; Silicon; Anisotropic silicon; MEMS design; anisotropic structures; mechanical coupling; microelectromechanical systems (MEMS);

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2005.845443

Filename

1492439