DocumentCode
113286
Title
Localized deposition of pure platinum nanostructures
Author
Lobo, Charlene J. ; Elbadawi, C. ; Toth, M.
Author_Institution
Univ. of Technol. Sydney, Sydney, NSW, Australia
fYear
2014
fDate
14-17 Dec. 2014
Firstpage
15
Lastpage
16
Abstract
Localized deposition of pure platinum nanostructures was achieved using a combination of focused electron beam induced processing (FEBID) of an inorganic platinum precursor and low temperature annealing in water vapour. This technique enables fabrication of Pt nanostructures with high spatial resolution and purity, for applications in nanoelectronics, sensing devices and catalysis.
Keywords
annealing; electron beam deposition; low-temperature techniques; nanofabrication; nanostructured materials; platinum; Pt; catalysis; focused electron beam induced processing; high spatial resolution; inorganic platinum precursor; localized deposition; low-temperature annealing; nanoelectronics; pure platinum nanostructures; sensing devices; water vapour; Annealing; Carbon; Electron beams; Materials; Nanostructures; Platinum; Fabrication; Nanostructured Materials; Platinum; Scanning Electron Microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on
Conference_Location
Perth, WA
Print_ISBN
978-1-4799-6867-1
Type
conf
DOI
10.1109/COMMAD.2014.7038639
Filename
7038639
Link To Document