Title :
Localized deposition of pure platinum nanostructures
Author :
Lobo, Charlene J. ; Elbadawi, C. ; Toth, M.
Author_Institution :
Univ. of Technol. Sydney, Sydney, NSW, Australia
Abstract :
Localized deposition of pure platinum nanostructures was achieved using a combination of focused electron beam induced processing (FEBID) of an inorganic platinum precursor and low temperature annealing in water vapour. This technique enables fabrication of Pt nanostructures with high spatial resolution and purity, for applications in nanoelectronics, sensing devices and catalysis.
Keywords :
annealing; electron beam deposition; low-temperature techniques; nanofabrication; nanostructured materials; platinum; Pt; catalysis; focused electron beam induced processing; high spatial resolution; inorganic platinum precursor; localized deposition; low-temperature annealing; nanoelectronics; pure platinum nanostructures; sensing devices; water vapour; Annealing; Carbon; Electron beams; Materials; Nanostructures; Platinum; Fabrication; Nanostructured Materials; Platinum; Scanning Electron Microscopy;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4799-6867-1
DOI :
10.1109/COMMAD.2014.7038639
