Title :
Sensitivity enhancement by surface texturing of Ag-doped BaTiO3-CuO thin film for CO2 gas sensor
Author :
Rudraswamy, S.B. ; Bhat, Navakanta
Author_Institution :
Indian Inst. of Sci., Bangalore, India
Abstract :
Surface texturing by fabricating micro and nano pillars of Ag-doped BaTiO3-CuO on Ag-doped BaTiO3-CuO mixed oxide thin films are evaluated for sensitivity enhancement for CO2 gas. The metal oxide film of 250 nm thickness is deposited on oxidized p-type Si <;100> substrate by RF Sputtering. Micro pillars of length 150 nm, 5um diameter and nano pillars of length 150 nm, 200 nm diameter of Ag-doped BaTiO3-CuO mixed oxide are fabricated on top of the film using lithography process. Sensing characteristics for different CO2 concentration are obtained for different operating temperatures. Surface textured sensor device shows enhanced sensitivity over thin film sensor.
Keywords :
barium compounds; carbon compounds; copper compounds; gas sensors; nanofabrication; nanolithography; nanosensors; nanostructured materials; silver; sputter deposition; surface texture; thin films; (BaTiO3-CuO):Ag; CO2; RF sputtering; gas sensor; lithography process; micropillars; mixed oxide thin films; nanopillars; p-type <;100> substrate; sensitivity enhancement; size 150 nm; size 200 nm; surface texturing; Films; Gas detectors; Nanostructures; Sensitivity; Surface texture; Zinc oxide; BaTiO3CuO; Carbon dioxide; Gas sensor;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4799-6867-1
DOI :
10.1109/COMMAD.2014.7038644
