Title :
Development Of nanowire devices with quantum functionalities
Author :
Stuiber, Michael ; van Beveren, Laurens H. Willems ; Johnson, Brett C. ; Weber, Walter M. ; Heinzig, Andre ; Beister, Jurgen ; Jamieson, David N. ; McCallum, Jeffrey C.
Author_Institution :
Centre of Excellence for Quantum Comput. & Commun. Technol., Australia
Abstract :
We describe a process to fabricate doped silicon nanowires in a 4-terminal setup.
Keywords :
elemental semiconductors; nanoelectronics; nanowires; semiconductor devices; silicon; 4-terminal setup; Si; quantum functionalities; silicon nanowire devices; Atom optics; Educational institutions; Erbium; Optical device fabrication; Silicon; Temperature measurement; Doping; nanofabrication; quantum transport; silicon nanowires;
Conference_Titel :
Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4799-6867-1
DOI :
10.1109/COMMAD.2014.7038655
