Metrology of holes in gold nano-film using interferometric microscopy

Author

Little, Douglas J. ; Kane, Deb M.

Author_Institution

Dept. of Phys. & Astron., Macquarie Univ. ~ Sydney, Sydney, NSW, Australia

fYear

2014

fDate

14-17 Dec. 2014

Firstpage

275

Lastpage

278

Abstract

We present an optical metrology technique based on phase-shifting interferometric (PSI) microscopy applied to circular holes in a gold nano-film. We demonstrate that the optical phase measured at the image plane can be accurately calculated, even in the presence of diffraction. For holes with a radius less than 200 nm, the optical phase exhibited a strong dependence on hole size, highlighting the metrological potential of this technique. Measurement of the coherent impulse response of the interferometric microscope, and refractive index measurements of nanoparticles and nano structure s are also discussed as potential applications.

Keywords

gold; light diffraction; nanoparticles; optical microscopy; phase shifting interferometry; refractive index; size measurement; circular holes; coherent impulse response; diffraction; gold nanofilm; hole size; image plane; interferometric microscope; metrological potential; nanoparticles; nanostructures; optical metrology technique; optical phase; phase-shifting interferometric microscopy; refractive index measurements; Microscopy; Optical diffraction; Optical imaging; Optical interferometry; Optical microscopy; Optical refraction; Optical variables control; Interferometric microscopy; Nanometrology; Nanophotonics; Refractive index metrology;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2014 Conference on

Conference_Location

Perth, WA

Print_ISBN

978-1-4799-6867-1

Type

conf

DOI

10.1109/COMMAD.2014.7038710

Filename

7038710