Widely Tunable MEMS-Based Fabry–Perot Filter

This paper describes the use of strain stiffening in fixed-fixed beam actuators to extend the tuning range of microelectromechanical-systems-based Fabry-Perot filters. The measured wavelength tuning range of 1.615-2.425 mum is the largest reported for such a filter. Curvature in the movable mirror was corrected using a low-power oxygen plasma to controllably alter the stress gradient in the mirror. After curvature correction, the linewidth of a filter was 52 nm, close to the theoretical minimum for our mirror design. As a proof of concept, a filter was bonded to a broadband infrared detector, realizing a wavelength-tunable infrared detector. All measured data have been compared to theoretical models of the optics and mechanics of the filters, with excellent agreement between theory and measurement demonstrated in all cases. Finally, the Young´s modulus and stress of the actuator materials were extracted directly from the measured voltage-displacement curves, demonstrating a novel technique for material property measurement.