Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing

Author

Li, Yue ; Vancura, Cyril ; Kirstein, Kay-Uwe ; Lichtenberg, Jan ; Hierlemann, Andreas

Author_Institution

Phys. Electron. Lab., ETH Zurich, Zurich

Volume

55

Issue

9

fYear

2008

Firstpage

2551

Lastpage

2560

Abstract

A resonant cantilever-based microsystem aimed at biochemical sensing is presented. The sensor system comprises a magnetically actuated resonant cantilever sensor array integrated with the feedback circuitry, digital control circuitry and a serial interface on a single chip in 0.8 mum CMOS technology. The sensor system shows a frequency stability of better than 3 Hz in water corresponding to a detection limit of about 30 pg mass loading. The system has been used for the detection of antibody-antigen interaction on the cantilever surface. The possibility to actuate and operate cantilever arrays in a liquid environment opens up a variety of new applications for bio-chemical sensing.

Keywords

CMOS integrated circuits; biochemistry; biosensors; cantilevers; chemical sensors; frequency stability; micromechanical devices; CMOS; antibody-antigen interaction; biochemical sensing; digital control circuitry; feedback circuitry; frequency stability; microsystem; monolithic resonant cantilever; serial interface; size 0.8 mum; Biosensor; CMOS; biosensor; chemical sensor; liquid phase; monolithic integration; resonant cantilever;

fLanguage

English

Journal_Title

Circuits and Systems I: Regular Papers, IEEE Transactions on

Publisher

ieee

ISSN

1549-8328

Type

jour

DOI

10.1109/TCSI.2008.922027

Filename

4490291