DocumentCode :
1134713
Title :
Controlling images parameters in the reconstruction process of digital holograms
Author :
Ferraro, Pietro ; Coppola, Giuseppe ; Alfieri, Domenico ; De Nicola, Sergio ; Finizio, Andrea ; Pierattini, Giovanni
Author_Institution :
CNR, Nat. Res. Council, Naples, Italy
Volume :
10
Issue :
4
fYear :
2004
Firstpage :
829
Lastpage :
839
Abstract :
Digital holograms recorded with a charge-coupled device array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size, and image resolution. Those explored potentialities open further the novel prospective of application of digital holography in single- and multiwavelengths operation either for display or metrological applications. We demonstrate the concept of controlling parameters in image reconstruction of digital holograms in some real situations for inspecting silicon microelectronic-mechanical systems structures.
Keywords :
CCD image sensors; holographic interferometry; image reconstruction; image resolution; micromechanical devices; optical focusing; optical microscopy; silicon; Fresnel-Kirchoff integral; charge-coupled device array; digital hologram reconstruction; focus distance; image parameters control; image resolution; image size; silicon microelectronic-mechanical systems; Control systems; Displays; Focusing; Holography; Image reconstruction; Image resolution; Microscopy; Phased arrays; Silicon; Size control; Holographic interferometry; holography; metrology; microelectromechanical devices; microscopy;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2004.833876
Filename :
1343970
Link To Document :
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