DocumentCode
1134713
Title
Controlling images parameters in the reconstruction process of digital holograms
Author
Ferraro, Pietro ; Coppola, Giuseppe ; Alfieri, Domenico ; De Nicola, Sergio ; Finizio, Andrea ; Pierattini, Giovanni
Author_Institution
CNR, Nat. Res. Council, Naples, Italy
Volume
10
Issue
4
fYear
2004
Firstpage
829
Lastpage
839
Abstract
Digital holograms recorded with a charge-coupled device array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size, and image resolution. Those explored potentialities open further the novel prospective of application of digital holography in single- and multiwavelengths operation either for display or metrological applications. We demonstrate the concept of controlling parameters in image reconstruction of digital holograms in some real situations for inspecting silicon microelectronic-mechanical systems structures.
Keywords
CCD image sensors; holographic interferometry; image reconstruction; image resolution; micromechanical devices; optical focusing; optical microscopy; silicon; Fresnel-Kirchoff integral; charge-coupled device array; digital hologram reconstruction; focus distance; image parameters control; image resolution; image size; silicon microelectronic-mechanical systems; Control systems; Displays; Focusing; Holography; Image reconstruction; Image resolution; Microscopy; Phased arrays; Silicon; Size control; Holographic interferometry; holography; metrology; microelectromechanical devices; microscopy;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/JSTQE.2004.833876
Filename
1343970
Link To Document