• DocumentCode
    1134713
  • Title

    Controlling images parameters in the reconstruction process of digital holograms

  • Author

    Ferraro, Pietro ; Coppola, Giuseppe ; Alfieri, Domenico ; De Nicola, Sergio ; Finizio, Andrea ; Pierattini, Giovanni

  • Author_Institution
    CNR, Nat. Res. Council, Naples, Italy
  • Volume
    10
  • Issue
    4
  • fYear
    2004
  • Firstpage
    829
  • Lastpage
    839
  • Abstract
    Digital holograms recorded with a charge-coupled device array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size, and image resolution. Those explored potentialities open further the novel prospective of application of digital holography in single- and multiwavelengths operation either for display or metrological applications. We demonstrate the concept of controlling parameters in image reconstruction of digital holograms in some real situations for inspecting silicon microelectronic-mechanical systems structures.
  • Keywords
    CCD image sensors; holographic interferometry; image reconstruction; image resolution; micromechanical devices; optical focusing; optical microscopy; silicon; Fresnel-Kirchoff integral; charge-coupled device array; digital hologram reconstruction; focus distance; image parameters control; image resolution; image size; silicon microelectronic-mechanical systems; Control systems; Displays; Focusing; Holography; Image reconstruction; Image resolution; Microscopy; Phased arrays; Silicon; Size control; Holographic interferometry; holography; metrology; microelectromechanical devices; microscopy;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/JSTQE.2004.833876
  • Filename
    1343970