Title :
Soft lithography replica molding of critically coupled polymer microring resonators
Author :
Poon, Joyce K. S. ; Yanyi Huang ; Paloczi, G.T. ; Yariv, A.
Author_Institution :
Depts. of Electr. Eng. & Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
Abstract :
We use soft lithography replica molding to fabricate unclad polystyrene (PS) and clad SU-8 microring resonator filters. The PS resonator has an intrinsic quality factor of 1.0×104 at /spl lambda/=1.55 μm, while that of the SU-8 resonator is 7100. The extinction ratios of the PS and SU-8 microring filters are -12 and -20 dB, respectively, with net insertion losses of 6.7 and 9.9 dB. The good quality factors and high extinction ratios of the microring resonator filters show the practicality of soft-lithography replica molding for the fabrication of integrated optical devices.
Keywords :
Q-factor; claddings; integrated optics; micro-optics; microcavities; moulding; optical couplers; optical fabrication; optical filters; optical losses; optical polymers; optical resonators; replica techniques; soft lithography; clad SU-8 microring resonator filter; extinction ratio; intrinsic quality factor; net insertion loss; soft lithography replica molding; unclad polystyrene microring resonator filter; Extinction ratio; Insertion loss; Optical device fabrication; Optical filters; Optical losses; Optical resonators; Polymers; Q factor; Resonator filters; Soft lithography;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.835610
