Soft lithography replica molding of critically coupled polymer microring resonators

Author

Poon, Joyce K. S. ; Yanyi Huang ; Paloczi, G.T. ; Yariv, A.

Author_Institution

Depts. of Electr. Eng. & Appl. Phys., California Inst. of Technol., Pasadena, CA, USA

Volume

16

Issue

11

fYear

2004

Firstpage

2496

Lastpage

2498

Abstract

We use soft lithography replica molding to fabricate unclad polystyrene (PS) and clad SU-8 microring resonator filters. The PS resonator has an intrinsic quality factor of 1.0×10⁴ at /spl lambda/=1.55 μm, while that of the SU-8 resonator is 7100. The extinction ratios of the PS and SU-8 microring filters are -12 and -20 dB, respectively, with net insertion losses of 6.7 and 9.9 dB. The good quality factors and high extinction ratios of the microring resonator filters show the practicality of soft-lithography replica molding for the fabrication of integrated optical devices.

Keywords

Q-factor; claddings; integrated optics; micro-optics; microcavities; moulding; optical couplers; optical fabrication; optical filters; optical losses; optical polymers; optical resonators; replica techniques; soft lithography; clad SU-8 microring resonator filter; extinction ratio; intrinsic quality factor; net insertion loss; soft lithography replica molding; unclad polystyrene microring resonator filter; Extinction ratio; Insertion loss; Optical device fabrication; Optical filters; Optical losses; Optical resonators; Polymers; Q factor; Resonator filters; Soft lithography;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.835610

Filename

1344079