DocumentCode
1136566
Title
Closed form expressions for RF MEMS switch actuation and release time
Author
Kaajakari, V.
Author_Institution
Inst. for Micromanufacturing, Louisiana Tech Univ., Ruston, LA
Volume
45
Issue
3
fYear
2009
Firstpage
149
Lastpage
150
Abstract
Closed form expressions for RF MEMS switch actuation and release times are derived. The expressions account for the mechanical and electrical parameters and are valid for V>1.15>VP and Q>0.1 where V is the actuation voltage, V P is the pull-in voltage, and Q is the mechanical quality factor.
Keywords
Q-factor; microswitches; RF MEMS switch actuation; actuation voltage; closed form expressions; electrical parameter; mechanical parameter; mechanical quality factor; pull-in voltage;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20093281
Filename
4770448
Link To Document