DocumentCode :
1138171
Title :
SAW and pseudo-SAW properties using matrix methods
Author :
Adler, Eric L.
Author_Institution :
Dept. of Electr. Eng., McGill Univ., Montreal, Que., Canada
Volume :
41
Issue :
5
fYear :
1994
Firstpage :
699
Lastpage :
705
Abstract :
Pseudo-surface-waves (PSAW´s), or leaky SAW´s, were first recognized over 25 years ago and the phase velocity (v/sub p/) and attenuation per wavelength (/spl alpha//spl lambda/) of PSAW modes for nonpiezoelectrics were calculated soon after. Since the seventies progress has been made in exploiting the higher velocities and electromechanical coupling constants (K/sup 2/=2/spl Delta/v/v) achievable with PSAW´s for piezoelectric device applications; this has stimulated new interest in the search for piezoelectric materials with orientations which have low /spl alpha//spl lambda/, high K/sup 2/, high v/sub p/. Procedures for calculating the PSAW properties (v/sub p/, /spl alpha//spl lambda/, and K/sup 2/) are not very explicitly given. In light of the preceding we present in this paper a review of the basic features of SAW and Pseudo-SAW´s using the matrix method. In this paper: the mechanically free open-circuited and short-circuited surface wave boundary value problems for piezoelectrics are formulated using the matrix method; two types of modes (SAW and PSAW) are described; and a number of computationally simple, frequency independent analytical functions are derived, from which /spl alpha//spl lambda/, v/sub p/, and K/sup 2/ are calculated for any direction on any material plane using commercially available PC software. The relationship of these functions to the effective permittivity concept, favoured by many researchers, is demonstrated and illustrative numerical examples for the PSAW´s reveals that low-loss orientations are quite sensitive to material constant values.<>
Keywords :
acoustic materials; acoustic wave absorption; acoustic wave velocity; boundary-value problems; matrix algebra; piezoelectric materials; surface acoustic waves; PC software; SAW; attenuation; effective permittivity concept; electromechanical coupling constants; leaky SAWs; low-loss orientations; material constants; matrix methods; nonpiezoelectrics; open-circuit; phase velocity; piezoelectric device applications; piezoelectric materials; pseudo-SAW; pseudo-surface-waves; short-circuit; surface wave boundary value problems; Attenuation; Boundary value problems; Frequency; High K dielectric materials; High-K gate dielectrics; Permittivity; Piezoelectric devices; Piezoelectric materials; Surface acoustic waves; Surface waves;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/58.308506
Filename :
308506
Link To Document :
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