DocumentCode
1138513
Title
Integrated optical detection circuit for magneto-optical drives
Author
Lapras, V. ; Mottier, P. ; Chabrol, C.
Author_Institution
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Volume
41
Issue
4
fYear
1995
fDate
11/1/1995 12:00:00 AM
Firstpage
1039
Lastpage
1049
Abstract
An integrated optical circuit (IOC) combining all the detection functions of a standard magneto-optical reading head (MO reading, focus and tracking control) is presented. The reading function is achieved by mean of a patented interferometric circuit. For tracking control, the well-known push-pull method has been applied and adapted to integrated optics. For focus control, an original method based on multimode interference, using the benefits of integrated optics has been successfully tested. The implemented technology is based on a silicon substrate with a silicon nitride core between two silica cladding layers (Si-SiO2-Si3N4-SiO2). This technology is a low cost technology that is well adapted for mass production. The optical components of the circuits are made by standard “hard contact” photolithography and reactive ion etching. Several wafers with about 50 devices have been processed and characterised. In particular, the detection signals have been compared with the detection signals delivered simultaneously by a standard commercial MO drive. This experiment demonstrates the feasibility of an integrated detection device for a MO drive
Keywords
integrated optoelectronics; light interferometry; magnetic heads; magneto-optical recording; optical signal detection; photolithography; sputter etching; MO drive; MO reading; Si-SiO2-Si3N4-SiO2; detection signals; experiment; focus control; hard contact photolithography; integrated optical detection circuit; integrated optics; interferometric circuit; low cost technology; magneto-optical drives; magneto-optical reading head; mass production; multimode interference; push-pull method; reactive ion etching; silica cladding layers; silicon nitride core; silicon substrate; tracking control; wafers; Circuit testing; Integrated optics; Interference; Magnetic circuits; Magnetic heads; Optical control; Optical detectors; Optical interferometry; Signal detection; Silicon;
fLanguage
English
Journal_Title
Consumer Electronics, IEEE Transactions on
Publisher
ieee
ISSN
0098-3063
Type
jour
DOI
10.1109/30.477222
Filename
477222
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