Title :
Subminiature silicon integrated electret capacitor microphone
Author :
Murphy, P. ; Hübschi, K. ; de Rooij, N. ; Racine, C.
Author_Institution :
Lectret SA, Meyrin-Geneva, Switzerland
fDate :
6/1/1989 12:00:00 AM
Abstract :
Microphones were prepared that use one silicon wafer to support a thin polyester diaphragm and a second to carry a Teflon or silicon dioxide electret. Subassemblies are diced from the wafer and bonded together to form complete microphones. The preamplifier circuit can be carried on either subassembly. Microphones with reasonable signal-to-noise ratios can be obtained with edge dimensions of 3 mm or less. The electroacoustic properties of prototype units are described
Keywords :
MOS integrated circuits; electrets; elemental semiconductors; microphones; preamplifiers; silicon; 3 mm; Si integrated electret capacitor microphone; SiO2 electret; Teflon electret; edge dimensions; electroacoustic properties; preamplifier circuit; signal-to-noise ratios; subassembly; thin polyester diaphragm; Capacitors; Chemical sensors; Electrets; Etching; FETs; Hearing aids; Impedance matching; Microphones; Preamplifiers; Silicon;
Journal_Title :
Electrical Insulation, IEEE Transactions on
