CCD soft-X-ray detectors with improved high- and low-energy performance

Author

Burke, B.E. ; Gregory, J.A. ; Loomis, A.H. ; Lesser, M. ; Bautz, M.W. ; Kissel, S.E. ; Rathman, D.D. ; Osgood, R.M., III ; Cooper, M.J. ; Lind, T.A. ; Ricker, G.R.

Author_Institution

Lincoln Lab., Massachusetts Inst. of Technol., Lexington, MA, USA

Volume

51

Issue

5

fYear

2004

Firstpage

2322

Lastpage

2327

Abstract

We describe results from recent enhancements to the performance of charge-coupled devices (CCDs) to both low- and high-energy soft X-rays. For improved low-energy (E<500 eV) sensitivity, we show that a low-temperature surface treatment on back-illuminated devices results in superior energy resolution compared to that of the devices flown on Chandra, which had a more process-intensive, high-temperature treatment. For improved high-energy response, we describe a design approach for MOS CCDs that allows high substrate biases for deep depletion (up to 160 μm) and, thus, improved X-ray detection for E>5 keV.

Keywords

X-ray detection; charge-coupled devices; cosmic ray apparatus; position sensitive particle detectors; semiconductor counters; CCD soft-X-ray detectors; Chandra space mission; MOS CCD; X-ray detection; back-illuminated devices; charge-coupled devices; deep depletion; high substrate bias; high-energy performance; high-energy soft X-rays; low-energy performance; low-energy soft X-rays; low-temperature surface treatment; process-intensive high-temperature treatment; sensitivity; superior energy resolution; Charge coupled devices; Circuits; Detectors; Electromagnetic wave absorption; Energy resolution; Radiative recombination; Space technology; Spontaneous emission; Surface treatment; X-rays;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/TNS.2004.835901

Filename

1344331